Lam Research Corporation, a supplier of wafer-fabrication equipment and related services to the semiconductor industry, has launched Pulsus, a production-oriented pulsed laser deposition (PLD) tool designed to help produce next-generation MEMS-based microphones and radio frequency (RF) filters.
This tool is expected to improve performance and capabilities in consumer electronics and automotive technology.
With the addition of Pulsus, the company has expanded its range of deposition, etch, and single-wafer clean products for specialty technologies. Pulsus is now available for select specialty device manufacturers.
Radio frequency (RF) filters are important for optimizing network performance in 5G, WiFi 6 and WiFi 6E networks, while MEMS microphones are used for voice control features and noise cancellation in 5G-enabled devices.
Pulsus deposits high-quality films, including aluminum scandium nitride (AlScN), which can improve the performance of RF filters and MEMS microphones. The pulsed laser deposition (PLD) process used by Pulsus involves directing a laser pulse at a target material to create thin layers on a wafer, ensuring precise film deposition.
The company says the solution helps improve film quality and uniformity, as well as reduce production costs compared to conventional methods. It also has the capability to deposit a range of materials, catering to various specialty technology applications such as augmented reality/virtual reality (AR/VR) and quantum computing.
“Lam leveraged deep expertise in specialty semiconductor technologies, proven capabilities in deposition and a strategic collaboration with CEA-Leti to bring this game-changing solution to customers on our production-proven 2300 platform,” said Chris Carter, group vice president and general manager of the customer support Business Group at Lam Research.
“Demand for manufacturing equipment used to make MEMS devices grew to more than US$940m in 2023 and could keep growing as chipmakers find new ways to improve device performance. The film quality of Pulsus holds tremendous value for 5G applications that require strong piezoelectric performance,” said John West, deputy director of manufacturing and global supply chain at Yole Group.
“Pulsus is an innovative solution to help optimize specialty devices now and advance technology roadmaps for varied applications to come.”
